•Fabricated according to drawing or specs
•Chamber material: 304/316 stainless steel,aluminium alloy
•Cooling system: Double layer water cooling
•Surface treatment: Sandblasting electrolysis,electrode polishing,mirror polishing
•Vacuum sealing: all metal sealing ring
•Vacuum standard: 6*10-5 pa
•Substrates lifting system can be supplied
Cloces
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